Damage and thermal annealing of In+ implanted a-axis...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1997 Vol. 122; Iss. 1

Damage and thermal annealing of In+ implanted a-axis sapphire

Dong-zhu Xie, De-xin Cao, De-zhang Zhu
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Volume:
122
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(96)00769-0
File:
PDF, 315 KB
english, 1997
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