Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 122; Iss. 4
Modification of nanometer scale wear of nitrogen-containing carbon films due to ion implantation
Shojiro Miyake, Shuichi Watanabe, Hajime Miyazawa, Masao Murakawa, Takanori Miyamoto, Reizo KanekoVolume:
122
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(96)00924-x
File:
PDF, 737 KB
english, 1997