Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
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Computer simulation of ion sputtering of polyatomic multilayered targets
B.J. Ber, V.S. Kharlamov, Yu.A. Kudrjavtsev, A.V. Merkulov, Yu.V. Trushin, E.E. ZhurkinVolume:
127-128
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(96)00941-x
File:
PDF, 488 KB
english, 1997