Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
Investigation of the annealing behavior of damage in Si implanted InP by photoacoustic and Raman spectroscopy
Hiroshi Kuwahata, Fumiya Uehara, Tokue Matsumori, Nobuo MutoVolume:
127-128
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(96)00972-x
File:
PDF, 348 KB
english, 1997