Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
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Optical centers and oxygen in Er-ion implanted silicon
Kenshiro Nakashima, Osamu Eryu, Osamu Iioka, Toshitake Nakata, Masanori WatanabeVolume:
127-128
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(96)00977-9
File:
PDF, 412 KB
english, 1997