Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
Photosensitivity of B, Si and N implanted silica
R.H. Magruder III, R.A. Zuhr, D.K. Hensley, S. WithrowVolume:
127-128
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(96)00978-0
File:
PDF, 458 KB
english, 1997