Ion beam assisted deposition of metallic and ceramic thin...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1997 Vol. 127-128; Iss. none

Ion beam assisted deposition of metallic and ceramic thin films

T. Šikola, J. Spousta, L. Ditrichová, L. Beneš, V. Peřina, D. Rafaja
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Volume:
127-128
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(96)01153-6
File:
PDF, 426 KB
english, 1997
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