Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
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Mechanism for ion beam passivation of copper surfaces
A.J. Kellock, M.H. Tabacniks, J.E.E. Baglin, N.S. Somcio, T.T. Bardin, D.C. MillerVolume:
127-128
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(96)01169-x
File:
PDF, 492 KB
english, 1997