Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
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Synthesis of multi-element thin-films using mixed metal plasma streams
Othon R. Monteiro, Zhi Wang, Peggy Y. Hou, Ian G. BrownVolume:
127-128
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(97)00014-1
File:
PDF, 521 KB
english, 1997