Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
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Layered structure diagnostic and optical modelling of c-BN films
M.F. Plass, W. Fukarek, A. Kolitsch, W. MöllerVolume:
127-128
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(97)00021-9
File:
PDF, 392 KB
english, 1997