Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
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Cleaning of metal surfaces by a broad beam ion source
Tomáš Šikola, Libuše Dittrichová, Jiří Spousta, Jakub Zlámal, Jan ŠtefkaVolume:
127-128
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(97)00022-0
File:
PDF, 443 KB
english, 1997