Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 127-128; Iss. none
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Ellipsometric investigation of damage distribution in low energy boron implantation of silicon
W. Fukarek, W. Möller, N. Hatzopoulos, D.G. Armour, J.A. van den BergVolume:
127-128
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(97)00024-4
File:
PDF, 568 KB
english, 1997