Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 124; Iss. 4
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Distribution of implanted impurities and deposited energy in high-energy ion implantation
F.F. Komarov, I.E. Mozolevski, P.P. Matus, S.E. AnanichVolume:
124
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(97)00094-3
File:
PDF, 459 KB
english, 1997