Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 130; Iss. 1-4
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Micromachining using deep ion beam lithography
S.V. Springham, T. Osipowicz, J.L. Sanchez, L.H. Gan, F. WattVolume:
130
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(97)00275-9
File:
PDF, 726 KB
english, 1997