Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 132; Iss. 1
On light suppressed divacancy formation at photon assisted ion implantation of silicon
M.Yu. Barabanenkov, V.N. Mordkovich, V.V. MikhnovichVolume:
132
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(97)00403-5
File:
PDF, 534 KB
english, 1997