On light suppressed divacancy formation at photon assisted...

On light suppressed divacancy formation at photon assisted ion implantation of silicon

M.Yu. Barabanenkov, V.N. Mordkovich, V.V. Mikhnovich
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Volume:
132
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(97)00403-5
File:
PDF, 534 KB
english, 1997
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