Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 132; Iss. 4
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Changes in the photoresist inhibitor distribution after ion irradiation and thermal treatment
D. Fink, R. Klett, M. Behar, G. Sánchez, J.R. Kaschny, W.G. HertleinVolume:
132
Year:
1997
Language:
english
Pages:
11
DOI:
10.1016/s0168-583x(97)00501-6
File:
PDF, 898 KB
english, 1997