Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 135; Iss. 1-4
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Phosphorus electrical activation in high energy P and high flux silicon implanted silicon
Wu Yuguang, Zhang Tonghe, Luo YanVolume:
135
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(97)00633-2
File:
PDF, 99 KB
english, 1998