Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 136-138; Iss. none
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Helium bubbles in silicon: Study of the residual helium content using elastic recoil detection analysis
J.R. Kaschny, P.F.P. Fichtner, A. Muecklich, U. Kreissig, R.A. Yankov, W. SkorupaVolume:
136-138
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(97)00713-1
File:
PDF, 364 KB
english, 1998