Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 136-138; Iss. none
Nucleation and growth of platelet bubble structures in He implanted silicon
P.F.P. Fichtner, J.R. Kaschny, A. Kling, H. Trinkaus, R.A. Yankov, A. Mücklich, W. Skorupa, F.C. Zawislak, L. Amaral, M.F. da Silva, J.C. SoaresVolume:
136-138
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(97)00714-3
File:
PDF, 525 KB
english, 1998