Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 136-138; Iss. none
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Observation of behavior of Ge δ-doped layer in Si(001)
Takashi Fuse, Kiyoshi Kawamoto, Takashi Shiizaki, Eisuke Tazou, Mitsuhiro Katayama, Kenjiro OuraVolume:
136-138
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(97)00794-5
File:
PDF, 478 KB
english, 1998