Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 136-138; Iss. none
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Using heavy ion backscattering spectrometry (HIBS) to solve integrated circuit manufacturing problems
J.C. Banks, B.L. Doyle, J.A. Knapp, D. Werho, R.B. Gregory, M. Anthony, T.Q. Hurd, A.C. DieboldVolume:
136-138
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(97)00817-3
File:
PDF, 522 KB
english, 1998