Quantitative compositional depth profiling of Si1−x−yGexCy...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1998 Vol. 136-138; Iss. none

Quantitative compositional depth profiling of Si1−x−yGexCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry

S.C. Gujrathi, S. Roorda, J.G. D'Arcy, Randall J. Pflueger, P. Desjardins, I. Petrov, J.E. Greene
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Volume:
136-138
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(97)00881-1
File:
PDF, 625 KB
english, 1998
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