Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 140; Iss. 1-2
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Evolution of mechanical strain and extended defects in annealed (1 0 0) silicon samples implanted with Ge+ ions
Yu. Suprun-Belevich, F. Cristiano, A. Nejim, P.L.F. Hemment, B.J. SealyVolume:
140
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0168-583x(97)00928-2
File:
PDF, 185 KB
english, 1998