Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 145; Iss. 1-2
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A transition radiation source with a grazing angle optic for step and scan lithography
M.A. Piestrup, M.W. Powell, S. Mrowka, J.T. Cremer, L.W. Lombardo, M.B. Chase, D. Snyder, H. Rietdyk, X.K. MaruyamaVolume:
145
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(98)00287-0
File:
PDF, 137 KB
english, 1998