Doping of 6H–SiC pn structures by proton irradiation

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1999 Vol. 147; Iss. 1-4

Doping of 6H–SiC pn structures by proton irradiation

Anatoly M Strel’chuk, Alexandre A Lebedev, Vitali V Kozlovski, Natali S Savkina, Denis V Davydov, Viktor V Solov’ev, Marina G Rastegaeva
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Volume:
147
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(98)00581-3
File:
PDF, 154 KB
english, 1999
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