Formation of complex Al–N–C layer in aluminium by...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1999 Vol. 147; Iss. 1-4

Formation of complex Al–N–C layer in aluminium by successive carbon and nitrogen implantation

V.V. Uglov, N.N. Cherenda, V.V. Khodasevich, V.A. Sokol, I.I. Abramov, A.L. Danilyuk, A. Wenzel, J. Gerlach, B. Rauschenbach
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Volume:
147
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(98)00592-8
File:
PDF, 223 KB
english, 1999
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