Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 147; Iss. 1-4
Behaviour of implanted oxygen and nitrogen in halogen lamp annealed silicon
A.I Belogorokhov, V.T Bublik, K.D Scherbachev, Yu.N Parkhomenko, V.V Makarov, A.B DanilinVolume:
147
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(98)00603-x
File:
PDF, 332 KB
english, 1999