Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 147; Iss. 1-4
Shallow junctions in p-In.53Ga.47As by ion implantation
M.N. Blanco, E. Redondo, C. León, J. Santamarı́a, G. González-Dı́azVolume:
147
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(98)00606-5
File:
PDF, 153 KB
english, 1999