Effects of ion beam irradiation on the crystallization of...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1999 Vol. 148; Iss. 1-4

Effects of ion beam irradiation on the crystallization of Si–C films

Shunichi Hishita, Keiji Oyoshi, Shigeru Suehara, Takashi Aizawa
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Volume:
148
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(98)00743-5
File:
PDF, 227 KB
english, 1999
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