Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 148; Iss. 1-4
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CN molecular negative-ion beam deposition and ion energy dependence of atomic bonds between carbon and nitrogen in the films
H Tsuji, T Yoshihara, S Nakamura, Y Gotoh, J IshikawaVolume:
148
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(98)00818-0
File:
PDF, 159 KB
english, 1999