Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 148; Iss. 1-4
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The investigation of optical and electrical properties of N+-implanted amorphous diamond-like carbon (DLC) films
I.A Faizrakhmanov, V.V Bazarov, V.A Zhikharev, I.B KhaibullinVolume:
148
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(98)00856-8
File:
PDF, 141 KB
english, 1999