Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 153; Iss. 1-4
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Dependence of energy distributions of sputtered and reflected atoms on incident fluence
W Eckstein, R Dohmen, H Friedrich, F HertweckVolume:
153
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(98)01016-7
File:
PDF, 222 KB
english, 1999