Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 153; Iss. 1-4
TRIM-DYNAMIC applied to marker broadening and SIMS depth profiling
Jochen BiersackVolume:
153
Year:
1999
Language:
english
Pages:
12
DOI:
10.1016/s0168-583x(98)01029-5
File:
PDF, 441 KB
english, 1999