Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 134; Iss. 1
An improved method for the study of neutral species produced in processing plasmas
J.A. Rees, D.L. Seymour, C.L. Greenwood, A. ScottVolume:
134
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(98)80035-9
File:
PDF, 240 KB
english, 1998