Computer simulation of sputtering of gold targets using Sb...

Computer simulation of sputtering of gold targets using Sb and Sb2 ions

Roger Webb, Michelle Kerford, Allan Way
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Volume:
153
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00060-9
File:
PDF, 491 KB
english, 1999
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