Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 153; Iss. 1-4
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Computer simulation of sputtering of gold targets using Sb and Sb2 ions
Roger Webb, Michelle Kerford, Allan WayVolume:
153
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00060-9
File:
PDF, 491 KB
english, 1999