Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 151; Iss. 1-4
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Structural modifications and electrical properties in ion-irradiated polyimide
A. De Bonis, A. Bearzotti, G. MarlettaVolume:
151
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0168-583x(99)00135-4
File:
PDF, 364 KB
english, 1999