Cutting, compression and shear of silicon small single...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1999 Vol. 153; Iss. 1-4

Cutting, compression and shear of silicon small single crystals

Masao Doyama, Tadatoshi Nozaki, Yoshiaki Kogure
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Volume:
153
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)00196-2
File:
PDF, 327 KB
english, 1999
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