Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
Ion beam induced charge collection (IBICC) of integrated circuits using a 10 MeV carbon microbeam
F.D McDaniel, B.N Guo, S.N Renfrow, M El Bouanani, J.L Duggan, B.L Doyle, D.S Walsh, T.J AtonVolume:
158
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)00313-4
File:
PDF, 303 KB
english, 1999