Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
Microprobe as implanter for semiconductor devices
J. Meijer, A. Stephan, J. Adamczewski, H. Röcken, U. Weidenmüller, H.H. Bukow, C. RolfsVolume:
158
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00334-1
File:
PDF, 208 KB
english, 1999