Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
A novel high precision slit system
O Schmelmer, G Dollinger, G Datzmann, C Goeden, H.-J KörnerVolume:
158
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)00357-2
File:
PDF, 251 KB
english, 1999