Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
Micromachining of silicon with a proton microbeam
P Polesello, C Manfredotti, F Fizzotti, R Lu, E Vittone, G Lerondel, A.M Rossi, G Amato, L Boarino, S Galassini, M Jaksic, Z PastuovicVolume:
158
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)00382-1
File:
PDF, 640 KB
english, 1999