Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
Reliability testing for the next generation of ULSI with SOI MOSFETs
M Takai, K Nakayama, H Takaoka, T Iwamatsu, Y Yamaguchi, S Maegawa, T Nishimura, A Kinomura, Y HorinoVolume:
158
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00388-2
File:
PDF, 481 KB
english, 1999