Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
Aluminium and silicon determination on two Si–Al sputter targets used for magnetron sputtering
G Terwagne, F BodartVolume:
158
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)00389-4
File:
PDF, 768 KB
english, 1999