Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
Resist materials for proton micromachining
J.A. van Kan, J.L. Sanchez, B. Xu, T. Osipowicz, F. WattVolume:
158
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(99)00392-4
File:
PDF, 1.32 MB
english, 1999