Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
Studies of charge collection mechanisms in SOI devices using a heavy-ion microbeam
Toshio Hirao, Tsuyoshi Hamano, Takuro Sakai, Isamu NashiyamaVolume:
158
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(99)00505-4
File:
PDF, 184 KB
english, 1999