Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 158; Iss. 1-4
Focused high energy proton beam micromachining: A perspective view
Frank WattVolume:
158
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0168-583x(99)00513-3
File:
PDF, 198 KB
english, 1999