Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 159; Iss. 3
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Effect of MeV O2+ implantation on the reactive ion etch rate of LiTaO3
Patrick W Leech, Mark C RidgwayVolume:
159
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(99)00578-9
File:
PDF, 105 KB
english, 1999