Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 160; Iss. 2
Ion charge state distributions in ECR-plasmas determined from mass spectrometry and X-ray spectroscopy
F Ullmann, G Zschornack, H TyrroffVolume:
160
Year:
1999
Language:
english
Pages:
11
DOI:
10.1016/s0168-583x(99)00592-3
File:
PDF, 311 KB
english, 1999