μm-resolved high resolution X-ray diffraction imaging for...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2000 Vol. 160; Iss. 4

μm-resolved high resolution X-ray diffraction imaging for semiconductor quality control

D Lübbert, T Baumbach, J Härtwig, E Boller, E Pernot
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Volume:
160
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(99)00619-9
File:
PDF, 636 KB
english, 2000
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