Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2000 Vol. 166-167; Iss. none
Depth distribution of Cu, Ag and Au ions implanted at low energy into insulators
A.L. Stepanov, V.A. Zhikharev, D.E. Hole, P.D. Townsend, I.B. KhaibullinVolume:
166-167
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(99)00641-2
File:
PDF, 219 KB
english, 2000